| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that vibration generated by ultrasonic irradiation is not transmitted through a cleaning liquid in some cases where the position of glass substrates or the condition of deposited matters on the glass substrate is not proper with no expected result achieved, and that too much time is taken to clean the glass sheets. SOLUTION: A glass substrate cleaning apparatus is provided. The cleaning apparatus comprises a water storage tank which stores water or the cleaning liquid, and a vibration generator which is arranged at the lower part of the water storage tank and vibrates the water or the cleaning liquid. At the upper part of the water storage tank, the cleaning apparatus also includes a pulley connected directly to a motor, rotating shafts connected to the pulley, first oscillation mechanisms composed of cam floors which generate oscillations, and a belt for transmitting torque generated by the motor to second oscillation mechanisms. A holder, holding an article to be cleaned, is placed on the rotating shafts. COPYRIGHT: (C)2005,JPO&NCIPI
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