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经营范围
发明名称
Protection of lithographic components from particle contamination
摘要
申请公布号
KR100618138(B1)
申请公布日期
2006.08.31
申请号
KR20007011929
申请日期
2000.10.26
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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