| 摘要 |
PROBLEM TO BE SOLVED: To easily evaluate the aberration state of the whole image focusing optical system every wavelength band while it is incorporated into a detector. SOLUTION: The position detector comprises a stage 12 for supporting a substrate 11, image focusing optical systems (18-24, and 40) for forming an image of inspected mark 11A on the substrate, processing means (25 and 26) for detecting the position of the inspected mark based on the image of the inspected mark, a pinhole that is attached to a stage and positioned in the visual field of the image focusing optical systems in evaluating the image focusing optical systems, a lighting means 13 for sequentially lighting the pinhole with light in a plurality of wavelength bands, and imaging fetching means 25 and 26 for fetching the image for evaluation every wavelength band based on the pinhole image formed by the light diffracted by the pinhole through the image focusing optical systems. COPYRIGHT: (C)2007,JPO&INPIT
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