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发明名称
METHOD OF MANUFACTURING MICRO MIRROR DEVICE AND MICRO MIRROR DEVICE MANUFACTURED THROUGH THE SAME
摘要
申请公布号
KR100814666(B1)
申请公布日期
2008.03.18
申请号
KR20010080365
申请日期
2001.12.18
申请人
发明人
分类号
G02B26/08;B01D53/88;B01J8/04;B81B3/00;B81C1/00;C01B3/16
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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