发明名称 |
Electron beam recorder and electron beam irradiation position detecting method |
摘要 |
An electron beam recorder includes an electron optical system for irradiating an electron beam on a master of an information recording medium and an electron beam irradiation position detecting unit for detecting an irradiation position of the electron beam in the electron optical system while the electron beam is being irradiated on the master by the electron optical system.
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申请公布号 |
US7359305(B2) |
申请公布日期 |
2008.04.15 |
申请号 |
US20040784391 |
申请日期 |
2004.02.23 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TSUKUDA MASAHIKO;ABE SHINYA |
分类号 |
G11B7/00;G11B9/10;G11B7/26;H01J37/304;H01J37/317 |
主分类号 |
G11B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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