| 摘要 |
PROBLEM TO BE SOLVED: To increase a follow-up property of a workpiece with respect to the surface of a grinding tool and perform highly smooth flattening at a low running cost with better reproducibility of grinding. SOLUTION: A workpiece 24 is pressed into contact with a machining surface of a disc-like grinding tool 21 rotatively driven and surface-ground with abrasive liquid being fed to the machining surface. In this case, a connecting shaft 28 having spherical bearings 28A, 30 and rotation transmitting shafts 29 are provided between a machining head part 12 and a support plate 25 which holds the workpiece 24, and with the rotation transmitting shaft 29 being as a guide, the workpiece 24 is tiltably moved. Moreover, a dresser part 13, which is formed with a dresser 31 for dressing the surface of the grinding tool 21 and a micropore 32 for recovering the abrasive liquid, and an abrasive liquid feeding part 17 which feeds the recovered abrasive liquid to the center of the grinding tool 21 for reuse are provided. |
