ELEKTRONISCHE EINRICHTUNG

摘要

The microelectromechanical system (MEMS) element ( 101 ) comprises a first electrode ( 31 ) that is present on a surface of substrate ( 30 ) and a movable element ( 40 ). This overlies at least partially the first electrode ( 31 ) and comprises a piezoelectric actuator, which movable element ( 40 ) is movable towards and from the substrate ( 30 ) by application of an actuation voltage between a first and a second position, in which first position it is separated from the substrate ( 30 ) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer ( 25 ) that is on opposite surfaces provided with a second and a third electrode ( 21,22 ) respectively, said second electrode ( 21 ) facing the substrate ( 30 ) and said third electrode ( 22 ) forming an input electrode of the MEMS element ( 101 ), so that a current path through the MEMS element ( 101 ) comprises the piezoelectric layer ( 25 ) and the tunable gap.