发明名称
摘要 An element includes a hollow space for a mechanically sensitive electrical element. The element includes a first housing part and a second housing part rigidly connected to the first housing part via joint surfaces. The element also includes connection surfaces on a base of a recess in the first housing the first housing part being covered by the second housing part to form an enclosed hollow space.
申请公布号 JP2009512369(A) 申请公布日期 2009.03.19
申请号 JP20080535876 申请日期 2006.09.29
申请人 发明人
分类号 H03H9/09;B81C99/00;H01L23/02;H01L23/06;H03H3/02;H03H3/04;H03H3/10;H03H9/02;H03H9/10;H03H9/24;H03H9/25 主分类号 H03H9/09
代理机构 代理人
主权项
地址