申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION;SHI, JIANOU;ZHANG, XIAFANG;PEI, SHIYOU;HUANG, SHU, CHUN;YEH, DENNIS;RZEPIELA, JEFFREY, A.;FENG, YIPING;KHAN, AHMAD;KAGAN, ALEXANDER;EDELSTEIN, SERGIO |
发明人 |
SHI, JIANOU;ZHANG, XIAFANG;PEI, SHIYOU;HUANG, SHU, CHUN;YEH, DENNIS;RZEPIELA, JEFFREY, A.;FENG, YIPING;KHAN, AHMAD;KAGAN, ALEXANDER;EDELSTEIN, SERGIO |