| 摘要 |
<p>A multi head laser direct imaging system is provided to perform a simple and minute patterning operation by forming a direct pattern in a substrate or a glass through a laser direct imaging technology without use of a mask. A splitter(210) branches a light of a single path generated in a light source(100). A scanner part(103,200) reflects a light branched in the splitter to a desired path. Optical units(105,106) guide a light reflected in the scanner part to a substrate(10). Optical path recognition parts(108,109) receive an effective optical path of a light reflected in a reflective surface of the scanner part. A control part(110) forms a desired pattern on the substrate by controlling the light source and the scanner part after receiving a synchronization signal in the optical path recognition part. A pattern generator(120) provides pattern information about a pattern to be patterned on the substrate to the control part.</p> |
