发明名称 |
TEMPORARY BONDING ADHESIVE FOR PROCESSING THIN WAFER AND PREPARATION METHOD THEREOF |
摘要 |
Disclosed in the present invention are a temporary bonding adhesive for processing a thin wafer and a preparation method thereof. Per 100 total parts by weight of the temporary bonding adhesive, the temporary boding adhesive comprises 55 to 70 parts by weight of a solvent and 30 to 45 parts by weight of a base resin dissolved or dispersed in the solvent. The base resin is a high polymer or a high polymer blend having a thermal decomposition temperature above 320˚C and a melt index above 24. The temporary bonding adhesive advantageously has a high thermal stability and a high corrosion resistance; furthermore, bonding/de-bonding of the temporary bonding adhesive is efficient, thus allowing easy cleaning of the residual adhesive layer, and preparation of the temporary bonding adhesive is economical. |
申请公布号 |
WO2016107146(A1) |
申请公布日期 |
2016.07.07 |
申请号 |
WO2015CN84687 |
申请日期 |
2015.07.21 |
申请人 |
SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY |
发明人 |
SUN, RONG;SHUAI, XINGTIAN;DENG, LIBO;ZHANG, GUOPING;GUO, HUIZI |
分类号 |
C09J133/04;C09J125/02;C09J125/16;C09J133/12;C09J167/00;H01L21/683 |
主分类号 |
C09J133/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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