发明名称 TEMPORARY BONDING ADHESIVE FOR PROCESSING THIN WAFER AND PREPARATION METHOD THEREOF
摘要 Disclosed in the present invention are a temporary bonding adhesive for processing a thin wafer and a preparation method thereof. Per 100 total parts by weight of the temporary bonding adhesive, the temporary boding adhesive comprises 55 to 70 parts by weight of a solvent and 30 to 45 parts by weight of a base resin dissolved or dispersed in the solvent. The base resin is a high polymer or a high polymer blend having a thermal decomposition temperature above 320˚C and a melt index above 24. The temporary bonding adhesive advantageously has a high thermal stability and a high corrosion resistance; furthermore, bonding/de-bonding of the temporary bonding adhesive is efficient, thus allowing easy cleaning of the residual adhesive layer, and preparation of the temporary bonding adhesive is economical.
申请公布号 WO2016107146(A1) 申请公布日期 2016.07.07
申请号 WO2015CN84687 申请日期 2015.07.21
申请人 SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY 发明人 SUN, RONG;SHUAI, XINGTIAN;DENG, LIBO;ZHANG, GUOPING;GUO, HUIZI
分类号 C09J133/04;C09J125/02;C09J125/16;C09J133/12;C09J167/00;H01L21/683 主分类号 C09J133/04
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