FILM THICKNESS CONTROL METHOD FOR MULTILAYER OPTICAL FILM, MANUFACTURING METHOD FOR MULTILAYER OPTICAL FILM, AND SPUTTERING DEVICE FOR MULTILAYER OPTICAL FILM

摘要

PROBLEM TO BE SOLVED: To provide a film thickness control method such that when a multilayer optical film is formed, respective optical films are made to have film thicknesses close to target values in a length direction and a width direction of a base material.SOLUTION: A control method for a film thickness of a multilayer optical film comprises the processes of: preparing a regression equation representing relation between film thicknesses of optical films and optical characteristic values of a multilayer optical film which are obtained through regressive analysis of a theoretical optical characteristic value group of the multilayer optical film to which a combination of the film thicknesses of the optical films is allocated; preparing a model equation representing relation between variation amounts of manufacture parameters and variation amounts of the film thicknesses of the optical films; finding measured values by measuring optical characteristic values at a plurality of places in the width direction of the formed multilayer optical film; calculating estimated film thickness deviation amounts for the plurality of places in the width direction by applying the measured values to the regression equation; calculating adjustment amounts of the manufacture parameters for a plurality of width-directional places needed to put the film thickness deviation amounts of the respective optical films closer to 0 by applying the estimated film thickness deviation amounts to the model equation; and dividing the manufacture parameters into the plurality of width-directional places based upon the adjustment amounts and changing the manufacture parameters.SELECTED DRAWING: Figure 3