PEELING DEVICE, PEELING SYSTEM, PEELING METHOD, PROGRAM, AND INFORMATION RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a peeling device in which breakdown of a substrate due to formation of a peeling starting point is suppressed.SOLUTION: A peeling device for peeling a bonded substrate of a first substrate and a second substrate into the first substrate and second substrate includes a blade for forming a cut, as a peeling start point, between the first substrate and second substrate, and an inspection part for inspecting the state of the tip of the blade. The inspection part has an imaging part for imaging the tip of the blade, and an image processing section for processing the image of the imaging part.SELECTED DRAWING: Figure 7