发明名称 |
PHOTOIMAGEABLE POLYOLEFIN COMPOSITIONS CONTAINING PHOTOBASE GENERATORS |
摘要 |
Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays. The compositions of this invention can be tailored to form positive tone or negative tone images depending upon the intended application in aqueous developable medium. The images formed therefrom exhibit improved properties including low wafer stress and better thermo-mechanical properties, among other property enhancements. |
申请公布号 |
WO2016133795(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
WO2016US17656 |
申请日期 |
2016.02.12 |
申请人 |
PROMERUS, LLC |
发明人 |
KANDANARACHCHI, Pramod;RHODES, Larry;NG, Hendra;ZHANG, Wei;KNAPP, Brian |
分类号 |
G03F7/004;G03F7/038 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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