Method and apparatus for detecting position of substrate transfer device, and storage medium

摘要

In a method for detecting a position of a substrate transfer device including a substrate supporting unit, the light-transmitting optical sensor is moved with respect to a detection target provided at a predetermined relative position with respect to a position where a substrate is to be transferred by the substrate transfer device, and a vertical dimension of the detection target that blocks the optical axis is measured by setting the substrate supporting unit in a first orientation and relatively moving up or down the optical sensor with respect to the detection target. A vertical dimension of the detection target that blocks the optical axis is measured by setting the substrate supporting unit in a second orientation and relatively moving the optical sensor with respect to the detection target. Horizontal coordinates of a reference position of the detection target are obtained based on the measured vertical dimensions in the respective orientations.

主权项

1. A method for detecting a position of a substrate transfer device including a substrate supporting unit for supporting a substrate, the substrate supporting unit being movable in a back-and-forth direction, movable in a direction intersecting with the back-and-forth direction and rotatable about a vertical axis, the method comprising:
providing a light-transmitting optical sensor at the substrate transfer device such that a light emitting portion and a light receiving portion of the optical sensor face each other in a direction intersecting with the back-and-forth direction, the light-transmitting optical sensor having an optical axis of which horizontal position and orientation are determined by a horizontal position and an orientation of the substrate supporting unit; providing a detection target at a predetermined relative position with respect to a position where a substrate is to be transferred by the substrate transfer device so as to block the optical axis of the optical sensor, the detection target having an inclined surface that is inclined when seen from an extension direction of the optical axis when the substrate supporting unit is set in a first orientation and an inclined surface that is inclined when seen from an extension direction of the optical axis when the substrate supporting unit is set in a second orientation; measuring a vertical dimension of the detection target that blocks the optical axis by setting the substrate supporting unit in the first orientation and relatively moving up or down the optical sensor with respect to the detection target; measuring a vertical dimension of the detection target that blocks the optical axis by setting the substrate supporting unit in the second orientation and relatively moving up or down the optical sensor with respect to the detection target; and obtaining horizontal coordinates of a reference position of the detection target based on measured vertical dimensions in the first orientation and the second orientation.