摘要 |
PURPOSE:To transmit the impure gas contained in a glow tube, especially H2 gas from the glow tube to a quartz glass tube in a short time and degas it economically and efficiently by vacuum-heating-processing the glow tube after its assembly exhaust treatment is completed. CONSTITUTION:The vacuum heating treatment of a glow tube is performed by degassing H2 gas from the glow tube. The H2 gas within the glow tube and the H2 gas occluded in the quartz glass of the glow tube can be removed easily and effectively by heating the exhausted and chip-sealed glow tube at a high vacuum (at a pressure of 10Torr<-4> or less) and at high temperature while allowing said gas to transmit through and diffusing over the quartz glass tube. The temperature and time required for the vacuum heating treatment slightly differs depending upon the thickness of the quartz glass. For the quartz glass with approximately 0.8mm. thickness, the H2 gas can be removed fully by applying vacuum treatment to it for about 1hr at a temperature exceeding 900 deg.C. |