| 摘要 |
PURPOSE:To deposite polycrystalline diamond on the surface of powder by fluidizing the powder in a plasma space, and causing a plasma chemical reaction. CONSTITUTION:Powder 9 of diamond, alpha-Al2O3, Mo or the like is charged into a plasma generating chamber 8, the chamber 8 is evacuated with an exhaust system 12, and a gaseous mixture of H2 with a volatile hydrocarbon such as methane is fed from a gas feeder 10 to the chamber 8 so as to keep a prescribed internal pressure. A low frequency oscillator 1 and an amplifier 2 are worked to oscillate a diaphragm 4 through a loudspeaker 3, and the powder 9 is fluidized in an appropriate state by regulating the frequency of the oscillator 1 and the output of the amplifier 2. A high frequency oscillator 5 is then worked, and the output is applied to a high frequency coil 7 to generate a plasma in the fluidized layer. The surface of the powder can be coated with polycrystalline diamond, or granular polycrystalline diamond can be synthesized using the powder as nuclei. |
