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发明名称
VERFAHREN ZUR OBERFLAECHENPASSIVIERUNG VON HALBLEITERSTRUKTUREN
摘要
申请公布号
DD300921(A7)
申请公布日期
1992.09.03
申请号
DD19880312677
申请日期
1988.02.04
申请人
ZENTRALINSTITUT FUER ELEKTRONENPHYSIK,DE;ZENTRALINSTITUT FUER ORGANISCHE CHEMIE,DE
发明人
WUNTSCHOFF,MARIO,DE;JUNG,THOMAS,DE;FALK,BERND,DE;RAUBACH,HEINZ,DE
分类号
H01L21/312;(IPC1-7):H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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