发明名称 |
Apparatus for polishing using improved plate supports |
摘要 |
A set of supports are advantageously disposed on a top plate having a polishing surface useful for polishing workpieces, thereby applying substantially uniform pressure to the top plate. In a preferred embodiment, the supports are non-isosceles triangular elements distributed evenly at 45 degree increments around a ring-shaped top plate. This structure effectively compensates for radial stress variations arising from non-optimum positioning of support points with respect to the inner and outer diameters of the polishing surface.
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申请公布号 |
US6168506(B1) |
申请公布日期 |
2001.01.02 |
申请号 |
US19980010008 |
申请日期 |
1998.01.21 |
申请人 |
SPEEDFAM-IPEC CORPORATION |
发明人 |
MCJUNKEN BOB |
分类号 |
B24B37/04;B24B41/04;(IPC1-7):B24B7/00;B24B41/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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