发明名称 |
Reinforced semiconductor wafer holder |
摘要 |
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The device includes a cover with a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. It also includes a purging means attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder. The holder has contoured recess-forming pairs that do not effect semiconductor wafer transfer when the recess forming pairs are warped. The recess-forming pairs also have integrally corresponding ribs that help prevent warpage of the contoured recess-forming pairs during the plastic injection molding process.
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申请公布号 |
US5476176(A) |
申请公布日期 |
1995.12.19 |
申请号 |
US19940247887 |
申请日期 |
1994.05.23 |
申请人 |
EMPAK, INC. |
发明人 |
GREGERSON, BARRY;WITTMAN, BOYD |
分类号 |
B65D85/86;B29C45/00;H01L21/673;(IPC1-7):B65D85/30 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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