发明名称 |
Method and apparatus for evacuating vacuum system |
摘要 |
<p>A method and apparatus for evacuating a vacuum system which includes an evacuating portion comprising a first and second vacuum pumps which are connected in series, the method and the apparatus are characterized in that the first vacuum pump is operated in a range from reverse rotation to forward rotation, and the second vacuum pump is rotated unidirectionally, thereby enabling pressure control of a vacuum system over a wide range. <MATH></p> |
申请公布号 |
EP0690235(A2) |
申请公布日期 |
1996.01.03 |
申请号 |
EP19950110090 |
申请日期 |
1995.06.28 |
申请人 |
EBARA CORPORATION;KABUSHIKI KAISHA TOSHIBA |
发明人 |
OKUMURA, KATSUYA;MIKATA, YUUICHI;TSUJIMURA, MANABU;ANDO, YOSHIO |
分类号 |
F04C25/02;F04C28/00;F04D19/04;F04D27/00;(IPC1-7):F04D27/00 |
主分类号 |
F04C25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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