| 发明名称 |
FLOW-THROUGH ION BEAM SOURCE |
| 摘要 |
A method and an apparatus (40) for forming a charge neutral ion beam (17) which is useful in producing thin films of material on electrically conductive or non-conductive substrates are provided.
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| 申请公布号 |
WO9745567(A1) |
申请公布日期 |
1997.12.04 |
| 申请号 |
WO1997US09575 |
申请日期 |
1997.05.29 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;SPRINGER, ROBERT, W. |
发明人 |
SPRINGER, ROBERT, W. |
| 分类号 |
C23C14/22;H01J27/02;(IPC1-7):C23C16/00;H05H1/24 |
主分类号 |
C23C14/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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