Distribution mask for controlling production of a coating by vapor deposition on substrate in treatment chamber

摘要

The distribution mask takes the form of at least two shading plates (22) which are substantially coplanar and, by means of a shared control device (23), are both continuously pivotable between two extreme positions corresponding to the minimum and maximum values of the distance (E) between them. Independent claims are given for: (a) a treatment chamber that accommodates the distribution mask; and (b) production of multilayered coatings on substrates characterized by the fact that the distribution mask used has a variable surface, and by the fact that this surface is modified for each of the layers.