| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a field emission type cathode, an electron emitting device and a manufacturing method of the electron emitting device capable of concentrating an electric field more efficiently by making fine and sharp the field emission type cathode K constituting a planar display device. SOLUTION: A field emission type cathode K constituting a planar display device is formed of sheet-like particle layered bodies of multi-layer structure 33 made up by heaping up sheet-like particles 30 made of a conductive carbon- bonded body on a formation surface thereof. Many sharp edges are formed, as electron emitting parts, on end faces of the layered bodies by exposing the sheet-like particle layered bodies by pattern etching. As the carbon-bonded body, graphite, amorphous carbon, diamond-like carbon, or the like is mentioned, and as the particles 30, circular sheet-like particles of the order of 500 nm in diameter and 21 nm in thickness are used.</p> |
