发明名称 METHOD FOR PRODUCING SUBSTRATE FOR USE IN ELECTRONIC PARTS AND SOLVENT FOR CLEANING
摘要 A method for producing a substrate for use in electronic parts which comprises the steps of: applying on a substrate a curable resin solution comprising an organic solvent and, dissolved or dispersed therein, a curable resin having a ring structure, treating the unwanted part of the curable resin solution which is adhered to at least a part of the perimeter, edge and back portion of the substrate with a cleaning solvent comprising a non-polar solvent and a polar solvent to thereby remove it, and drying the curable resin solution applied on the substrate. The method allows the cleaning in a short time as compared to a conventional method and also leads to the production of a substrate for use in electronic parts being improved in the property of low expansion of the curable resin portion after drying and excellent in the shape of a perpendicular cross section
申请公布号 WO0184615(A1) 申请公布日期 2001.11.08
申请号 WO2001JP03615 申请日期 2001.04.26
申请人 ZEON CORPORATION;KODEMURA, JUNJI 发明人 KODEMURA, JUNJI
分类号 C11D7/50;C09D201/02;C11D7/24;C11D11/00;G03F7/16;G03F7/42;H01L21/311;H01L21/312;H01L21/56;(IPC1-7):H01L21/312;C11D7/26;H01L21/027 主分类号 C11D7/50
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