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经营范围
发明名称
GROOVE WIDTH TRIMMING
摘要
申请公布号
EP0616573(B1)
申请公布日期
2002.01.02
申请号
EP19930920156
申请日期
1993.08.18
申请人
IC SENSORS, INC.
发明人
JERMAN, JOHN, H.
分类号
F15C5/00;H01L21/302;(IPC1-7):B44C1/22;H01L21/306;H01L49/02;H01L21/033
主分类号
F15C5/00
代理机构
代理人
主权项
地址
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