| 摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration of detection accuracy of a focal point position when there is a light quantity fluctuation in an object having an uneven part. SOLUTION: The method has an image input process of picking up an image of an object to be inspected, an single image density ratio detecting process of determining a concentration between a target picture element inside a preset partial image and a comparison picture element of a reference size by comparing density ratios between images, a plural image density ratio dejecting process of calculating a value farthest from 1 from density ratio data in the same place of the plural images, and a composited image outputting process of setting a target picture element concentration of an image selected by the plural image density ratio detecting process in a composited output image. |
