| 摘要 |
PROBLEM TO BE SOLVED: To improve the productivity and total throughput by shortening a time for changeover of processings for different lots in the operation of a semiconductor aligner. SOLUTION: The lead wafer of a succeeding lot is carried to a waiting position located in the vicinity of a wafer stage during the exposure of the wafer of a preceding lot upon changeover of lots in the operation of the semiconductor aligner. For this, wafer position adjusting information is transmitted to wafer position adjusting means even in the course of the processing of the preceding lot before the lead wafer of the succeeding lot reaches the wafer position adjusting means, and wafers are carried at all times to the waiting position located in the vicinity of the wafer stage after the wafer position is adjusted on the basis of the adjustment information. Consequently, even upon changeover of lots different in wafer position adjustment amounts among lots, a time for changeover is shortened, and so the productivity and total throughput are improved. COPYRIGHT: (C)2005,JPO&NCIPI
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