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发明名称
Integrationsschema für ein vollständig silizidiertes Gate
摘要
申请公布号
DE112006000584(T5)
申请公布日期
2008.04.17
申请号
DE200611000584T
申请日期
2006.03.10
申请人
INFINEON TECHNOLOGIES AG
发明人
CULMSEE, MARCUS;DONI, LOTHAR;WENDT, HERMANN
分类号
H01L21/336;H01L21/28
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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