发明名称 |
Low-voltage flexible optic polymer modulators |
摘要 |
An electro-optic modulator is formed from all flexible materials, to form a flexible electro-optic modulator. The formation process uses a photoresist which selectively adheres to one material more than it adheres to another material. This allows selective liftoff, where only parts of the substrate are lifted off. For example, this allows silicon ends on the modulator, thereby facilitating pig tailing and also facilitates handling. Another aspect describes testing the bending radius.
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申请公布号 |
US7366363(B2) |
申请公布日期 |
2008.04.29 |
申请号 |
US20050112870 |
申请日期 |
2005.04.21 |
申请人 |
UNIVERSITY OF SOUTHERN CALIFORNIA |
发明人 |
STEIER WILLIAM H.;SONG HYUN-CHAE;OH MIN-CHEOL;AHN SEH-WON |
分类号 |
G02F1/035;G02B6/12;G02B6/138;G02F1/065;G02F1/225;G02F1/295;H01L21/70 |
主分类号 |
G02F1/035 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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