| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for pulling a single crystal which is capable of automatically aligning precisely a crystal axis and a crucible axis, suppressing swinging of a growing single crystal and manufacturing a single crystal with high productivity. SOLUTION: In a method for pulling a single crystal using the Czochralski method, at least when the crown or the straight trunk portion of a single crystal is grown, axis-centering to settle the centering position of the crystal is done in applying a magnetic field to a raw material solution and swinging is settled by transferring a wire in a horizontal plane in case swinging of the wire occurs up to a predetermined amplitude or more in growing the single crystal. As a method for adjusting axis centers, the position of the wire 12 is detected by a laser sensor 14 and the crucible axis center information memorized in a RAM beforehand and the wire axis center (crystal axis center) information are compared and the crystal axis center and the crucible axis center are aligned by moving the XY table of a XY table system 10 equipped with a center aligning function through a controller 16 by a servomechanism in case the crystal axis center is off the crucible axis center. COPYRIGHT: (C)2009,JPO&INPIT
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