| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing technology performing a satisfactory shaping process by eliminating inconvenience in the attachment of a support member to a body to be processed by use of a resin film. SOLUTION: The manufacturing method for the structure includes: (a) a first step in which a first liquid material (16) is applied onto the projections (12b) of a body (10) to be processed that has a step structure on one side thereof, thereby forming the first resin film (18); (b) a second step in which a second liquid material (20) is injected into the recesses (12a) of the body to be processed, thereby forming the second resin film (24); a third step in which a support member is stuck to the one side of the processed body via the first resin film; a fourth step in which the other side of the processed body is etched, thereby subjecting it to the shaping process; and a fifth step in which the support member is detached from the body to be processed. COPYRIGHT: (C)2009,JPO&INPIT
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