| 摘要 |
A structure for removing powder on conveyor belt is provided to prevent the particle generation and improve the productivity by removing the contaminant adhering to the conveyer belt in the process of depositing the thin film on wafer. In a structure for removing powder on a conveyor belt, hyper-pure water is sprayed from a blow nozzle(57) of the hyper-pure water injector(56) towards the conveyer belt before or after a conveyer belt(B) is put into the hyper-pure water receiving portion(52). The first and second filters(54a,54b) are installed at the outer circumference of the rotation roller(53). The contaminant adhered to the conveyer belt surface is removed by the first and the second filter.
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