| 摘要 |
PROBLEM TO BE SOLVED: To provide a small condenser microphone having improved sensitivity. SOLUTION: A condenser microphone includes a substrate having an opening in a back cavity, a diaphragm comprising a deposition film facing the opening and the periphery of the opening on the substrate and having conductive properties, a plate comprising a deposition film facing the diaphragm and having conductive properties, and a support structure, constituted of a deposition film, forming gaps between the substrate, the diaphragm, and the plate. Projections are formed in the portion facing the opening on a surface of the diaphragm facing the substrate so as to project towards the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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