发明名称 APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
摘要 In the present invention, disclosed are a display device, and an apparatus and a method for manufacturing the display device. The apparatus for manufacturing the display device comprises: a dry cleaning unit for removing a foreign material from a surface of a mother substrate; an electrolytic processing unit connected to the dry cleaning unit, and electrolytically processing the surface of the mother substrate; and an exfoliation layer forming unit connected to the electrolytic processing unit, and forming a mechanical exfoliation layer on the mother substrate.
申请公布号 KR20160087971(A) 申请公布日期 2016.07.25
申请号 KR20150006975 申请日期 2015.01.14
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 JOO, HYUN WOO;RYU, SUNG WOO;SHIM, JAE WON;YONG, WHAN CHAE;JUNG, SUK WON;HUH, MYUNG SOO
分类号 H01L51/56;H01L21/02;H01L21/3063;H01L27/32 主分类号 H01L51/56
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