发明名称 |
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS |
摘要 |
In the present invention, disclosed are a display device, and an apparatus and a method for manufacturing the display device. The apparatus for manufacturing the display device comprises: a dry cleaning unit for removing a foreign material from a surface of a mother substrate; an electrolytic processing unit connected to the dry cleaning unit, and electrolytically processing the surface of the mother substrate; and an exfoliation layer forming unit connected to the electrolytic processing unit, and forming a mechanical exfoliation layer on the mother substrate. |
申请公布号 |
KR20160087971(A) |
申请公布日期 |
2016.07.25 |
申请号 |
KR20150006975 |
申请日期 |
2015.01.14 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
JOO, HYUN WOO;RYU, SUNG WOO;SHIM, JAE WON;YONG, WHAN CHAE;JUNG, SUK WON;HUH, MYUNG SOO |
分类号 |
H01L51/56;H01L21/02;H01L21/3063;H01L27/32 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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