| 主权项 |
1. An apparatus for manufacturing an inorganic thin-film solar cell, the apparatus comprising:
a substrate stage which is mounted in a chamber and in which a windable solar cell substrate is disposed, the substrate stage including a stage heating plate configured to provide heat to the solar cell substrate; a roll-to-roll unit disposed at both ends of the chamber, the roll-to-roll unit including a pay-out roller mounted at one end thereof so as to allow the solar cell substrate to be paid out therefrom, and a wind-in roller mounted at the other end thereof so as to allow the solar cell substrate to be wound therearound so that the solar cell substrate can be moved while passing through the chamber; and an inorganic powder supply unit disposed in the chamber, the inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle, wherein the inorganic powder is deposited on the solar cell substrate, wherein the inorganic powder supply unit comprises a flow regulator disposed between the inorganic powder supply portion and the nozzle and configured to regulate a flow rate of the inorganic powder aerosol, and the inorganic powder supply portion comprises: a transport gas supply portion configured to provide a transport gas for transporting the inorganic powder; and an inorganic powder supply portion configured to receive the transport gas from the transport gas supply portion and feed the inorganic powder aerosol to the nozzle through the supply of the inorganic powder by virtue of the flow of the transport gas, wherein the apparatus further comprises: a sensing unit including a nozzle temperature sensor disposed at the nozzle and configured to detect the temperature of the inorganic powder aerosol through the nozzle, a nozzle pressure sensor disposed at the nozzle and configured to detect the pressure of the inorganic powder aerosol through the nozzle, a chamber temperature sensor configured to detect the internal temperature of the chamber, and an image sensor portion disposed between the nozzle and the wind-in roller and configured to detect image information on the solar cell substrate; a control unit connected to the sensing unit and configured to receive the detected signal from the sensing unit; an arithmetic operation unit configured to calculate the nozzle velocity of the inorganic powder aerosol discharged through the nozzle based on the detected signals of the nozzle pressure sensor and the nozzle temperature sensor in response to an operation control signal from the control unit; and a storage unit connected to the storage unit and configured to store a preset data containing a reference nozzle velocity compared with the nozzle velocity to determine whether or not the discharge state of the nozzle is in a normal state, and a reference thickness compared with the thickness information extracted from the image information to determine whether or not the thickness of the inorganic powder sprayed onto the one side of the solar cell substrate is normal. |
