| 摘要 |
According to one exemplary embodiment, an apparatus for microreplication is disclosed. The apparatus includes a cooling unit that contains a bottom layer, a plurality of side walls, and an intermediate layer. The bottom layer has an outer perimeter, and the plurality of side walls surround the outer perimeter of the bottom layer. The intermediate layer is positioned between the bottom layer and an upper portion of the side walls. The intermediate layer may include a plurality of openings, which may either hold a device that dispenses cooling agents or be used for drainage of cooling agents. The method utilizes the apparatus after heating and pressing of a polymer film during microreplication. |
