| 摘要 |
PURPOSE:To form an electrode in an optional shape by irradiating a substrate with laser light and thus drawing an electrode pattern on the substrate. CONSTITUTION:A laser light generation part 110 generates, for example, a YAG laser and its output laser light is collimated through lenses 111 and 112, reflected by a total reflection mirror 114, and converged through a lens 113 to be focused on a thin metallic film formed on the surface of a piezoelectric substrate 116. A moving stage 115 is driven by an X-directional moving mechanism 118 and a Y-directional moving mechanism 119 to move. Through the movement of the moving stage 115, an optional electrode pattern 123 is drawn on the piezoelectric substrate 116. Further, a variable opening mechanism 122 is provided on the laser optical path and the beam diameter of the laser light is varied to control the electrode width, gap, etc., of the electrode pattern 1, drawn on the substrate 116, optionally. |
