| 摘要 |
<p>PURPOSE:To enable the smooth and sure delivery by a method wherein the dog of a chain conveying mechanism receiving a susceptor performs delivering, by hanging, at retard, the protrusion in front of a bent side edge of the susceptor. CONSTITUTION:When chain conveying mechanisms are driven in the same direction, by driving equipments installed outside the respective film forming chambers 1, the dog 20 of the film forming chamber 1 of pre-stage pushes the rear side of the protrusion 11b of a bent side edge of the susceptor 13, and sends the susceptor 13. The dog 20 of the film forming chamber 1 of post-stage goes, in retard, behind a protrusion 11a; after the sending by the dog 20 of pre-stage is finished, the dock 20 of post-stage reaches the rear of the protrusion 11a with some delay; from this position, the moving of the susceptor 13 by the dog 20 of post-stage is started. Thereby, the susceptor 13 can be smoothly and surely delivered, even if small difference generates between the moving speeds of both chain conveying mechanisms.</p> |
