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发明名称
METHOD OF ION IMPLANTATION
摘要
申请公布号
EP0303486(A3)
申请公布日期
1990.09.12
申请号
EP19880307442
申请日期
1988.08.11
申请人
OKI ELECTRIC INDUSTRY COMPANY, LIMITED
发明人
FUKUDA, HISASHI OKI ELECTRIC INDUSTRY CO., LTD.
分类号
H01J37/08;H01J37/317;(IPC1-7):H01L21/265
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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