发明名称 |
CMOS DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A CMOS(Complementary Metal Oxide Silicon) device and a fabrication method thereof are provided to removing a cause of a latch-up generation by forming a PMOS on a NMOS after forming the NMOS on a substrate. CONSTITUTION: An NMOS(N channel Metal Oxide Silicon) and a PMOS(P channel Metal Oxide Silicon) device are formed on a substrate(11) having a well sequentially. The NMOS device is composed of a gate electrode(15) and N+ region(16) for a source/drain on both side of the gate electrode. The PMOS device is composed of a gate electrode(25) formed between the NMOS device and an interlayer dielectric, and P+ region(26) for a source/drain on both side of the gate electrode. The P+ region for the source/drain of the PMOS is formed by implanting a P type impurity on an N type polysilicon layer.
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申请公布号 |
KR100290471(B1) |
申请公布日期 |
2001.03.02 |
申请号 |
KR19940020915 |
申请日期 |
1994.08.24 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
LEE, HUI SEUNG;LEE, JEONG SEOK |
分类号 |
H01L27/08;(IPC1-7):H01L27/08 |
主分类号 |
H01L27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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