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发明名称
STRAIGHTNESS MEASURING APPARATUS
摘要
申请公布号
JPH04326005(A)
申请公布日期
1992.11.16
申请号
JP19910096592
申请日期
1991.04.26
申请人
RES DEV CORP OF JAPAN;NIKON CORP
发明人
ISHIDA AKIRA
分类号
G01B11/30;G01B11/27
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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