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发明名称
FOREIGN MATTER INSPECTION DEVICE
摘要
申请公布号
JPH05288536(A)
申请公布日期
1993.11.02
申请号
JP19920094266
申请日期
1992.04.14
申请人
TOSHIBA CORP
发明人
TSUMURA AKIRA
分类号
G01B11/30;G01N21/88;G01N21/94;G01N21/956;(IPC1-7):G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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