| 摘要 |
PURPOSE:To reduce the absorption of soft X rays with window members for partioning each function part in an X-ray evaluation apparatus using the soft X rays having the energy of 4keV or less. CONSTITUTION:In a vaccum chamber 2, at least one place of spaces among an X-ray source 4, an X-ray spectroscope 7 for dividing the X rays from the X-ray source 4, a manupilator 9, which holds a sample 8 at a position where the spectral X rays are cast, and a detector 13, which detects the X rays and the electron beams emitted from the sample 8, is partitioned with super-thin-film window members 3a and 3b, whose thickness is 5,000Angstrom or less. Thus, the vacuum state is obtained. |
