| 发明名称 |
Plasma fluorine resistant polycristalline alumina ceramic material and method of making |
| 摘要 |
<p>A plasma fluorine resistant polycrystalline alumina ceramic material includes between about 99.5% and 99.8% by weight of alumina and about 0.5% to 0.2% by weight of a binder and has a unimodal grain size distribution.</p> |
| 申请公布号 |
EP0708065(A1) |
申请公布日期 |
1996.04.24 |
| 申请号 |
EP19950116350 |
申请日期 |
1995.10.17 |
| 申请人 |
APPLIED MATERIALS, INC.;THE MORGAN CRUCIBLE COMPANY PLC |
发明人 |
DYER, TIMOTHY S.;CHENG, TSUNGNAN;SMITH, PETER C. |
| 分类号 |
C04B35/10;C04B35/111;C23C14/50;C23C16/44;C23C16/458;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C04B35/111 |
主分类号 |
C04B35/10 |
| 代理机构 |
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