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发明名称
FORMATION OF SPUTTERED FILM
摘要
申请公布号
JPH10130814(A)
申请公布日期
1998.05.19
申请号
JP19960282455
申请日期
1996.10.24
申请人
SONY CORP
发明人
KARIYA RYUICHI
分类号
C23C14/00;H01L21/203;H01L21/285;(IPC1-7):C23C14/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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