| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain especially uniformity among the steepness, symmetry and uniformity of the voltage/current characteristics of a nonlinear element by supplying temperature distribution based on the difference of the characteristics of a 2-terminal type nonlinear element to a substrate and performing heat treatment. SOLUTION: An insulation film 31 formed on the substrate 30 is turned into a base, a thin film diode(TFD) element 20 is formed on the upper surface and is constituted of first metallic film 22, oxidized film 24 which is an insulator and second metallic film 26 in an order from the side of the insulation film 31 and the sandwich structure of metal - insulator - metal is adopted. Then, in the heat treatment process, a computer stores resistance value change characteristics beforehand and obtains the characteristic distribution of the element from the result of TEG or the like measured beforehand and the result of automatically measuring the characteristics of the TFD element 20 of an element array substrate 30 over plural points. In such a manner, the temperature distribution corresponding to the characteristic distribution of the element is calculated, a heat treatment device is controlled and the temperature distribution is supplied to the element array substrate 30.</p> |
