| 摘要 |
<p>PROBLEM TO BE SOLVED: To separate pellets at specified intervals and ensure adequate spaces among them with respect to an expanding apparatus for a pellet bonder, by heating the entire surface face of the wafer sheet uniformly and softening and expanding a wafer sheet, when the wafer sheet is cut at given intervals. SOLUTION: An expanding apparatus includes a ring-shaped wafer ring 12, on which a wafer is stuck on a face of a wafer sheet 11 and cut by dicing into each pellet 10, an expanding ring 13 put near to an inner circumference of the wafer ring 12 for supporting the wafer sheet 11, and a pressing ring 14 for pushing the wafer ring 12 and expanding the wafer sheet 11 supported by the expanding ring 13. In addition, a nozzle 15 is provided at a lower part of the wafer ring 12 for blowing warm air 16, while the nozzle 15 is moved to shift a blowing position of the warm air 16. In this case in particular, the opening 15 for blowing the warm air is set rotatable and slanted with respect to the rotating center.</p> |
