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经营范围
发明名称
Inspection apparatus and method for detecting defects
摘要
申请公布号
EP0930498(A3)
申请公布日期
1999.11.17
申请号
EP19980124350
申请日期
1998.12.21
申请人
NIDEK CO., LTD.
发明人
YONEZAWA, EIJI
分类号
G01N21/956;(IPC1-7):G01N21/88
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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