| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state image pickup element for increasing the controllability of an inter-microlens distance and production stability at formation of a microlens, and for obtaining a microlens whose pratical sensitivity is high, and a method for manufacturing this solid-state image pickup element. SOLUTION: This method for manufacturing a solid-state image pickup element, having an on-chip microlens 9 comprises a process for forming a pattern 8 constituted of a resist for a microlens, in which the difference between the surface tension and that of a flattened layer 7 is 30 mN/m or more at a desired position on the flattened layer 7, and a process for carrying out the heating treatment of the pattern 8 for forming the on-chip microlens 9.
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